SMC高真空閥XL.XM.XY系列

在半導(dǎo)體制造過程中，腐蝕裝置、噴鍍裝置，離子注入裝置和CVD裝置等許多部分，都要把芯片和液晶基板放在真空室內(nèi)處理，該真空
室供氣、排氣(真空)用閥，要求它們無泄漏、耐腐蝕且是潔凈規(guī)格。

SMC高真空閥XL.XM.XY系列
 

XLA-16
XLA-160
XLA-16-2
XLA-16A-F9NA
XLA-16A-M9NA
XLA-16G-M9//
XLA-16G-M9NLA
XLA-16H0-F9NLA
XLA-16-M9NA
XLA-16-M9NLA
XLA-25
XLA-25-2
XLA25-30-1-M9//
XLA-25A
XLA-25A-M9NC
XLA-25G
XLA-25G-F9NLA
XLA-25G-M9//
XLA-25G-M9NLA
XLA-25-M9//
XLA-25-M9NLA
XLA-40
XLA-40-2
XLA-40A
XLA-40G-2M9NLA
XLA-40GH0
XLA-40G-M9//
XLA-40G-M9NLA
XLA-40-M9//
XLA-40-M9NLA
XLA-50
XLA-50-2
XLA-50H0-F9NLA
XLA-63
XLA-63-2M9//
XLA-63DA-F9NA
XLA-63DA-M9NA
XLA-63H0-F9NLA
XLA-80
XLAQ-25
XLAV-25F-5HZ
XLAV-25GF9BB5LZ
XLAV-40F-5G
XLAV-63DF-5LZ
XLC-16
XLC-25
XLC-40
XLC-50-1
XLC-50-1M9//
XLC-80-1
XLD-25
XLD-25-A93LA
XLD-25K-M9//
XLD-25-M9NC
XLD-50
XLD-50-M9BA
XLD-50-M9NC
XLD-63-M9NA
XLF-16
XLF-16-F9PA
XLF-16-M9PA
XLF-16-XN1A
XLF-16-XN1B
XLF-25
XLF-25H3
XLF-25-XN1A
XLF-40
XLF-40H3
XLF-50-XS1A
XLFR-100D-1
XLG-25
XLG-25-M9BLA
XLG-25-M9NA
XLG-40
XLG-40-M9NA
XLG-40-M9NC
XLG-50
XLG-50-1
XLG-50-M9BLA
XLG-50-M9NLA
XLG-80
XLG-80-1
XLG-80-M9NLA
XLH-25
XLH-25-XN1A
XLH-50
XLS16-20-P5G
XLS-16-5D
XLS-16-5G
XLS-16-P2G
XLS-16-P4G
XLS-16-P5G
XLS-25-5G
XLS-25-P2G
XLS-25-P5G
XLS-25-PG
XMA-16
XMA-25
XMA-40
XMA-40-A90LA
XMA-40A-M9//
XMA-40A-M911
XMA-40A-M9NL
XMA-40A-M9NLC
XMA-40CM
XMC-16
XMC-40
XMD-63DL-M9//
XMF-16A